System analysis lab is equipped with probe station, signal generator, programmable power supply,logic analyzer, programmer,protocol analyzer,development boards etc.
Prcoess analysis lab is equipped with SEM, TEM, SIMS, RIE, ICP, X-ray, AIE, XRD, EDX, etc. This lab can analysis a variety of process such as CMOS, BCD, BiCMOS, SOI, GaAs, GaN, SiGe, SiC. The lab supports 7nm FinFET device process analysis.
Etching lab is equipped with advanced AIE, ICP, RIE, CMP etc. With the leading equipments, Cellix has successful finished etching of over 40,000+ IC since 2002.
Image acquisition lab is equipped with SEM, OM, X-ray, EDX etc. This lab can take hundreds of thousands of photos each day.